The Global
Information Hub for
Lighting Technologies
and Design
Metal-assisted chemical etching uses two steps. First, a thin layer of gold is patterned on top of a semiconductor wafer with soft lithography (top-left). The gold catalyzes a chemical reaction that etches the semiconductor form the top down, creating three-dimensional structures for optoelectronic applications (bottom-left). A scanning electron microscope image of “nanopillars” etched in gallium arsenide (right). | Graphic & Image by Xiuling Lihttps://zmi.led-professional.com/Plone/media/technology_light-generation_new-developed-technique-makes-it-easier-to-etch-semiconductors-especially-iii-v-semiconductors_Metal-assisted%20chemical%20etching%20uses%20two%20steps%20-University%20of%20Illinois.jpg/viewhttps://zmi.led-professional.com/Plone/media/technology_light-generation_new-developed-technique-makes-it-easier-to-etch-semiconductors-especially-iii-v-semiconductors_Metal-assisted%20chemical%20etching%20uses%20two%20steps%20-University%20of%20Illinois.jpg/@@images/image-1200-421696e858fda0c4d328f3ccbd265b07.jpeg
Metal-assisted chemical etching uses two steps. First, a thin layer of gold is patterned on top of a semiconductor wafer with soft lithography (top-left). The gold catalyzes a chemical reaction that etches the semiconductor form the top down, creating three-dimensional structures for optoelectronic applications (bottom-left). A scanning electron microscope image of “nanopillars” etched in gallium arsenide (right). | Graphic & Image by Xiuling Li